MEMS-Based Pressure Sensors

May 27, 2015

Jenny Hessler

Melexis offers two pressure sensors combining high sensitivity with strong linearity. Qualified to AEC-Q100, the MLX90815 and MLX90816 are discrete micro-electro-mechanical system (MEMS) devices for measuring absolute pressure in demanding environments. The MLX90815 is suitable for 0 to 30 bar (0 to 435 psi), while the MLX90816 covers full-scale pressures from 30 to 50 bar (435 to 725 psi). As pressure is applied to a micro-machined silicon pressure membrane, a differential voltage change occurs across the outputs of a connected piezo-resistive Wheatstone bridge while a bias voltage is applied to the bridge inputs. Sensors are suited to various pressure monitoring applications and feature an operational temperature range of -40 to 150°C (-40 to +302°F). Devices can be used in conventional non-aggressive media or incorporated into oil-filled sensor modules.