Confocal Height Sensor

February 1, 2011

Newport Corporation (Irvine, CA) now has a confocal height sensor available for use with the company’s MRSI dispense systems. The chromatic confocal sensor allows measurements in a single axis, providing access to deep cavities, confined spaces, and areas that are in close proximity to walls and other obstructions, making it ideal for RF and microwave packages, which have been difficult to measure using traditional, reflective-laser height-sensing techniques. An LED light source with a sensor spot size of 50 microns in diameter is utilized to provide nanoresolution that is nearly target independent. The confocal sensor allows accurate measurement of glass, semiconductor materials, and mirrored surfaces. It can be used to precisely determine dispense heights for three of Newportís legacy products, the MRSI-175Ag, the MRSI-605, and the MRSI M-5.