High-Precision Motion Components Drive Advances in Semiconductor Production

Overview

The white paper from IKO International, Inc. discusses the critical role of high-precision motion components in advancing semiconductor production. As manufacturers strive to produce more powerful chips with shrinking die sizes, the demand for faster and more reliable production machines has intensified. The paper emphasizes that achieving high throughput and yield in automated wafer handling, inspection, and cleaning requires meticulous attention to the design of motion control components.

Key components highlighted include crossed roller bearings (CRBs), linear guides, and positioning tables, which are essential for executing complex motion profiles with superior accuracy over millions of cycles. These components must meet several challenges faced by semiconductor manufacturers, including the need for high production reliability, tool complexity, space constraints, and defect prevention. The paper outlines that even minor inaccuracies in motion can lead to significant losses, especially when producing chips at the nanometer scale.

IKO's innovative solutions, such as the Liquid Crystal Lubrication technology, are introduced as alternatives to traditional greases, offering superior outgassing characteristics and long-term durability. This technology minimizes evaporation and dust generation, making it suitable for high-vacuum and cleanroom environments, which are critical in semiconductor fabrication.

The paper also discusses IKO's NT Series of linear driven positioning tables, which are designed for compactness and precision, making them ideal for automated semiconductor applications. These tables feature low sectional heights and high repeatability, essential for maintaining accuracy in cleanroom settings. Additionally, the C-Lube technology integrated into select linear guides and positioning tables provides maintenance-free operation through controlled lubricant release, further enhancing reliability.

In conclusion, the white paper underscores the importance of selecting high-performance motion components that can withstand the rigorous demands of modern semiconductor manufacturing. By partnering with a manufacturer like IKO, companies can ensure they achieve greater returns on their investments while maintaining the precision and reliability necessary for next-generation fabrication equipment. The insights provided serve as a valuable resource for industry professionals looking to enhance their production capabilities and address the challenges of semiconductor fabrication.