MEM Inertial Accelerometer

The Model 1525 Series microelectromechanical (MEM) variable capacitive accelerometers from Silicon Designs Inc. are a low-cost, integral, inertial accelerometer family. The nitrogen-damped, hermetically sealed devices are designed for zero-to-medium frequency instrumentation applications that require high repeatability, low noise, and maximum stability. Each miniature package combines a MEMS variable capacitive sense element and a custom integrated circuit that includes both a sense amplifier and ±4.0 V differential output stage. Units are available in six full-scale ranges from ±2 to ±100 g, with reliable performance over a standard operating temperature range of -40°C to +85°C (-40° to +185°F). The devices are suited for applications including unmanned ground vehicles, remotely operated vehicles, robotic control systems, and agricultural drones.