RF Power Generator
MKS Instruments (Andover, MA) offers the elite™ 13.56 MHz, single- phase RF power generator for amorphous Si PV, LED, and MEMS applications. The single PCBA design is air-cooled, lightweight, and easy to install for RF deposition and etch needs. The generator is available in 2U full rack and 3U half rack enclosures for rack mounting, in power levels of 300W, 600W, and 750W. The design eliminates cables and connectors, and patented inductive clamp technology protects the unit from adverse VSWR load conditions.
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